Shin Myoung | Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Un
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概要
- 同名の論文著者
- Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Unの論文著者
関連著者
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Shin Myoung
Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Un
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Ahn Jinho
School Of Materials Science And Engineering Hanyang University
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Lee Taeho
School Of Materials Science And Engineering Hanyang University
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Kim Jiyoung
Department Of Radiation Oncology : Brain Korea 21 Project For Medical Science Yonsei University Medi
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OH Tae
Department of Nano Science and Technology, Sungkyunkwan University
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NA Sung-Woong
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan U
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LEE Nae-Eung
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan U
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Oh Tae
Department Of New Materials Engineering Kookmin University
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Lee Nae-eung
Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Un
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Na Sung-woong
Department Of Materials Engineering And Center For Advanced Plasma Surface Technolog Sungkyunkwan Un
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Kim Jiyoung
Department Of Bioscience And Biotechnology And Bio/molecular Informatics Center Konkuk University
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Oh Tae
Department Of Information Media Engineering Myongji College
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Ahn Jinho
School of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
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Oh Tae
Department of New Materials Engineering, Kookmin University, Seoul 861-1, Korea
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Lee Nae-Eung
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Shin Myoung
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Lee Taeho
School of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
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Na Sung-Woong
Department of Materials Engineering and Center for Advanced Plasma Surface Technolog, Sungkyunkwan University, Suwon, Kyunggi-do 440-746, Korea
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Kim Jiyoung
Department of New Materials Engineering, Kookmin University, Seoul 861-1, Korea
著作論文
- Dry Etching of TaN/HfO_2 Gate Stack Structure by Cl_2/SF_6/Ar Inductively Coupled Plasma
- Dry Etching of TaN/HfO2 Gate Stack Structure by Cl2/SF6/Ar Inductively Coupled Plasma