WANG Junli | Advanced Science and Technology Center for Cooperative Research, Kyushu University
スポンサーリンク
概要
関連著者
-
WANG Junli
Advanced Science and Technology Center for Cooperative Research, Kyushu University
-
WANG Dong
Advanced Science and Technology Center for Cooperative Research, Kyushu University
-
ZHAO Liwei
Advanced Science and Technology Center for Cooperative Research, Kyushu University
-
MAKIYAMA Kazuya
Advanced Science and Technology Center for Cooperative Research, Kyushu University
-
SUGIMOTO Youhei
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
-
SAITOU Taishi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
-
NAKASHIMA Hiroshi
Advanced Science and Technology Center for Cooperative Research, Kyushu University
-
LUU Nam
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
-
Luu Nam
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
-
Nam Luu
Advanced Science And Technology Center For Cooperative Research Kyush Univ.
-
Nam Luu
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
-
Wang Junli
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
-
Nakashima Hideharu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
-
Makiyama Kazuya
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
著作論文
- Effect of Ion Mass and Ion Energy on Low-Temperature Deposition of Polysrystalline-Si Thin Film on SiO_2 Layer by Using Sputtering-Type Electron Cyclotron Resonance Plasma
- Growth Kinetics and Electrical Properties of Ultrathin Si Oxide Film Fabricated Using Krypton-Diluted Oxygen Plasma Excited by Electron Cyclotron Resonance
- Formation of Ultra-thin Si Oxide for High-k Gate Dielectrics Interface Engineering Using Electron Cyclotron Resonance (ECR) Plasmas Oxidation