Nam Luu | Advanced Science And Technology Center For Cooperative Research Kyush Univ.
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概要
- NAM Luu Hoai[et al.]の詳細を見る
- 同名の論文著者
- Advanced Science And Technology Center For Cooperative Research Kyush Univ.の論文著者
関連著者
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Nam Luu
Advanced Science And Technology Center For Cooperative Research Kyush Univ.
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WANG Junli
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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ZHAO Liwei
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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Nam Luu
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
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Zhao Liwei
Advanced Science And Technology Center For Cooperative Research Kyush Univ.
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Wang Junli
Venture Business Laboratory Kyushu Univ.
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Wang Junli
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
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MAKIYAMA Kazuya
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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Makiyama Kazuya
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
著作論文
- Formation of Ultra-thin Si Oxide for High-k Gate Dielectrics Interface Engineering Using Electron Cyclotron Resonance (ECR) Plasmas Oxidation
- Structural and electrical properties of Zr oxide film for high-κ gate dielectrics by using electron cyclotron resonance plasma sputtering