MAKIYAMA Kazuya | Advanced Science and Technology Center for Cooperative Research, Kyushu University
スポンサーリンク
概要
関連著者
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WANG Junli
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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MAKIYAMA Kazuya
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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WANG Dong
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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ZHAO Liwei
Advanced Science and Technology Center for Cooperative Research, Kyushu University
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LUU Nam
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
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Luu Nam
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Nam Luu
Advanced Science And Technology Center For Cooperative Research Kyush Univ.
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Nam Luu
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
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Wang Junli
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
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Nakashima Hideharu
Interdisciplinary Graduate School Of Engineering Sciences Kyushu University
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Makiyama Kazuya
Advanced Science And Technology Center For Cooperative Research Kyushu Univ.
著作論文
- Growth Kinetics and Electrical Properties of Ultrathin Si Oxide Film Fabricated Using Krypton-Diluted Oxygen Plasma Excited by Electron Cyclotron Resonance
- Formation of Ultra-thin Si Oxide for High-k Gate Dielectrics Interface Engineering Using Electron Cyclotron Resonance (ECR) Plasmas Oxidation