SAITOU Taishi | Interdisciplinary Graduate School of Engineering Sciences, Kyushu University

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概要

関連著者

SUGIMOTO Youhei
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
WANG Junli
Advanced Science and Technology Center for Cooperative Research, Kyushu University
SAITOU Taishi
Interdisciplinary Graduate School of Engineering Sciences, Kyushu University
WANG Dong
Advanced Science and Technology Center for Cooperative Research, Kyushu University
ZHAO Liwei
Advanced Science and Technology Center for Cooperative Research, Kyushu University
NAKASHIMA Hiroshi
Advanced Science and Technology Center for Cooperative Research, Kyushu University

著作論文

Effect of Ion Mass and Ion Energy on Low-Temperature Deposition of Polysrystalline-Si Thin Film on SiO_2 Layer by Using Sputtering-Type Electron Cyclotron Resonance Plasma

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