Kanda Kazuhiro | Graduate School of Science, LASTI, Himeji Institute of Technology
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概要
Graduate School of Science, LASTI, Himeji Institute of Technology | 論文
- Room Temperature Nanoimprinting Using Release-Agent Spray-Coated Hydrogen Silsesquioxane
- Bilayer Resist Method for Room-Temperature Nanoimprint Lithography
- Fluorinated Diamond-Like Carbon Coating as Antisticking Layer on Nanoimprint Mold
- Examination of Focused-Ion-Beam Repair Resolution for UV-Nanoimprint Templates
- Room-Temperature Nanoimprinting Using Ladder Hydrogen Silsesquioxane