Bonding Structure of the Cross-link in Organosilicate Films Using O_2/BTMSM Precursors
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-04-15
著者
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Ahn Khi-jung
Faculty Of Telecommunication And Computer Engineering Cheju National University
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Choi Chi
Department Of Veterinary Surgery College Of Veterinary Medicine Konkuk University
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Choi Chi
Department Of Physics Cheju National University
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OH Teresa
Nano Thin Film Materials Lab., Cheju National University
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LEE Kwang-Man
Faculty of Electrical amd Electronic Engineering, Research Institute of Advanced Technology, Cheju N
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KO Sung-Teak
Faculty of Electrical amd Electronic Engineering, Research Institute of Advanced Technology, Cheju N
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KIM Kyung-Sik
Faculty of Electrical amd Electronic Engineering, Research Institute of Advanced Technology, Cheju N
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Kim Kyung-sik
Faculty Of Electrical Amd Electronic Engineering Research Institute Of Advanced Technology Cheju Nat
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Choi C
Department Of Physics Cheju National University
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Ko Sung-teak
Faculty Of Electrical Amd Electronic Engineering Research Institute Of Advanced Technology Cheju Nat
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Oh Teresa
Nano Thin Film Materials Lab. Cheju National University
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Lee Kwang-man
Faculty Of Electrical Amd Electronic Engineering Research Institute Of Advanced Technology Cheju Nat
関連論文
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- A Formation and Characteristics of the Fluorinated Amorphous Carbon Films with Low Dielectric Constant by HDPCVD
- A Formation and Characteristics of the Fluorinated Amorphous Carbon Films with Low Dielectric Constant by HDPCVD
- Bonding Structure of the Cross-link in Organosilicate Films Using O_2/BTMSM Precursors
- 頚椎に発生した浸潤性脂肪腫の犬の1例(外科学)
- Redshift and Blueshift Due to Interaction between C-H Bond of Methyl Radicals and Highly Electronegative Oxygen
- Porosity of Organosilicate Films in a Range of Organic Properties
- Bonding Structure of the Cross-link in Organosilicate Films Using O2/BTMSM Precursors
- Porosity of Organosilicate Films in a Range of Organic Properties