Porosity of Organosilicate Films in a Range of Organic Properties
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概要
- 論文の詳細を見る
Organosilicate films divide into three properties, organic, hybrid and inorganic depending on the flow rate ratio between oxygen and bistrimethylsilylmethane precursor. The films with organic properties show decreased dielectric constant, because of pore incorporation in final materials. In this study, the porosity of organosilicate films with organic properties was investigated using the Maxwell–Garnett equation. The porosity of the films could be correlated with their IR properties, and increasing the porosity decreases the dielectric constant of the film.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-09-15
著者
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Choi Chi
Department Of Physics Cheju National University
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Kim Kyung
Faculty Of Electrical And Electronic Engineering Cheju National University
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Oh Teresa
Research Institute Of Advanced Technology Cheju National University
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Lee Kwang-man
Faculty Of Electrical Amd Electronic Engineering Research Institute Of Advanced Technology Cheju Nat
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Choi Chi
Department of Physics, Cheju National University, 1 Ara-dong, Jeju 690-756, Korea
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Lee Kwang-Man
Faculty of Electrical and Electronic Engineering, Cheju National University, 1 Ara-dong, Jeju 690-756, Korea
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Kim Kyung
Faculty of Electrical and Electronic Engineering, Cheju National University, 1 Ara-dong, Jeju 690-756, Korea
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