Enhanced and Retarded SiO₂ Growth on Thermally Oxidized Fe-Contaminated n-Type Si(001) Surfaces
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概要
- 論文の詳細を見る
- 2013-04-00
著者
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Shimizu Hirofumi
Department Of Electrical And Electronic Engineering College Of Engineering Nihon University
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Hagiwara Hiroyuki
Department of Electrical and Electronic Engineering, College of Engineering, Nihon University, Koriyama, Fukushima 963-8642, Japan
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