Effect of High-Pressure Inert Gas Annealing on AlON/Ge Gate Stacks

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概要

• 論文の詳細を見る

著者

• Takahashi Toshitake

  Department Of Materials Engineering School Of Engineering The University Of Tokyo

関連論文

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• Effect of High-Pressure Inert Gas Annealing on AlON/Ge Gate Stacks
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