Fabrication of 20nm Shallow Nanofluidic Channels Using Coverslip Thin GlassGlass Fusion Bonding Method

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Kuo Ju-nan

  Department Of Automation Engineering National Formosa University

• Lin Yi-Kai

  Department of Automation Engineering, National Formosa University, Yunlin, Taiwan 632

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