High-Performance Stress-Induced Micromachined Optical Switch with Multiswitching Function Using Seesaw Structure

概要

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In this paper, we present a high-performance electrostatically actuated optical switch with a multiswitching function using stress-induced bending micromirrors and a seesaw structure. The use of a curved polysilicon seesaw structure and a torsional beam substantially lowers the electrostatic operating voltage of the optical switch and provides a multi-switching function. Large mirror deflection angles of 15° (with a mirror elevation of 310 μm) are obtained at a low operating voltage of 17 V. Furthermore, the device demonstrates a submillisecond switching time (${<}900$ μs) and a low optical insertion loss (0.65 dB). The developed optical switch, which uses mirrors in an $N \times N$ array, could redirect $4N$ optical inputs to $4N$ outputs. The compact nature of the optical multiswitch element renders it ideal for the construction of optical crossconnects (OXCs) with a large number of ports on a chip.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-06-15