Microoptical Interferometer Utilizing Surface-Micromachined Microgratings and Synthetic Heterodyne Technique
スポンサーリンク
概要
- 論文の詳細を見る
In this paper, I present a synthetic heterodyne microoptical interferometer consisting of a fixed grating mirror, two rotatable reflection mirrors, and a movable grating mirror driven by an electrostatically actuated comb structure. The use of the comb drive actuator permits a high-speed movement of the grating, and therefore provides both a wide modulation frequency and a wide frequency response. A synthetic heterodyne technique was arranged to interrogate the output signal from the interferometer. The experimental results indicate that the use of the proposed microoptical interferometer provides a suitable solution for signal modulation and optical measurement in microscale applications.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2008-09-25
著者
関連論文
- Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings
- Multiple Optical Traps with a Single-Beam Optical Tweezer Utilizing Surface Micromachined Planar Curved Grating
- Splitter Microchannel Network for Equal Plasma Flow Division on Compact Disk Microfluidic Chip
- Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Micromachined Bilayer Cantilever
- Fabrication of 20nm Shallow Nanofluidic Channels Using Coverslip Thin GlassGlass Fusion Bonding Method
- Capillary-Driven Dynamics of Water in Hydrophilic Microscope Coverslip Nanochannels
- Optical Trapping of Beads and Jurkat Cells Using Micromachined Fresnel Zone Plate Integrated with Microfluidic Chip
- High-Performance Stress-Induced Micromachined Optical Switch with Multiswitching Function Using Seesaw Structure
- Three-Dimensional Optical Focusing Systems Utilizing Stress-Induced Bending of Concave Micromirrors
- Microoptical Interferometer Utilizing Surface-Micromachined Microgratings and Synthetic Heterodyne Technique