Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2005-06-10

著者

• Pan Wen-fung

  Department Of Engineering Science National Cheng Kung University

• KUO Ju-Nan

  Department of Automation Engineering, National Formosa University

• LEE Gwo-Bin

  Department of Engineering Science, National Cheng Kung University

• Kuo Ju-nan

  Department Of Automation Engineering National Formosa University

• Lee Gwo-bin

  Department Of Engineering Science National Cheng Kung University

• Kuo Ju-nan

  Department Of Engineering Science National Cheng Kung University

関連論文

• The Effect of Mean Curvature on the Response and Collapse of Thin-Walled Tubes under Cyclic Bending(Fatigue & Fracture)
• High-Performance Stress-Induced Micromachined Optical Switch with Multiswitching Function Using Seesaw Structure
• Surface-Micromachined Optical Interferometry System Utilizing Three-Dimensional Micromirrors and Microgratings
• Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Micromachined Bilayer Cantilever
• Three-Dimensional Optical Focusing Systems Utilizing Stress-Induced Bending of Concave Micromirrors
• Characterization of SnO_2/TiO_2 Double-Layer Films as Alcohol Sensing Materials
• Experimental and Theoretical Evaluations of the Effect between Diameter-to-Thickness Ratio and Curvature-Rate on the Stability of Circular Tubes under Cyclic Bending
• Multiple Optical Traps with a Single-Beam Optical Tweezer Utilizing Surface Micromachined Planar Curved Grating
• An Experimental Study on the Effect of Curvature-Rate at Preloading Stage on Subsequent Creep or Relaxation of Thin-Walled Tubes under Pure Bending
• Endochronic Simulation for Multiaxial Creep
• Splitter Microchannel Network for Equal Plasma Flow Division on Compact Disk Microfluidic Chip
• Endochronic Analysis for Viscoplastic Collapse of a Thin-Walled Tube under Combined Bending and External Pressure
• New Fabrication Process for Monolithic Probes with Integrated Heaters for Nanothermal Machining
• Shape and Thermal Effects of Metal Films on Stress-Induced Bending of Micromachined Bilayer Cantilever
• Fabrication of 20nm Shallow Nanofluidic Channels Using Coverslip Thin GlassGlass Fusion Bonding Method
• Capillary-Driven Dynamics of Water in Hydrophilic Microscope Coverslip Nanochannels
• Optical Trapping of Beads and Jurkat Cells Using Micromachined Fresnel Zone Plate Integrated with Microfluidic Chip
• High-Performance Stress-Induced Micromachined Optical Switch with Multiswitching Function Using Seesaw Structure
• Micro Flow Cytometer Chip Integrated with Micro-Pumps/Micro-Valves for Multi-Wavelength Cell Counting and Sorting
• Enhancement of Electrokinetically-Driven Flow Mixing in Microchannel with Added Side Channels
• Three-Dimensional Optical Focusing Systems Utilizing Stress-Induced Bending of Concave Micromirrors
• Microoptical Interferometer Utilizing Surface-Micromachined Microgratings and Synthetic Heterodyne Technique

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