High-Precision Quadrupole Correction Lens for Ion-Beam Focusing : Design and Test of Multistage Self-Aligned Quadrupole Correction-Lens System

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Okayama Shigeo

  Nanoelectronics Research Institute National Institute Of Advanced Industrial Science And Technology

• SUGIYAMA Yasuhiko

  SII NanoTechnology Inc.

関連論文

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• High-Precision Quadrupole Correction Lens for Ion-Beam Focusing : Design and Test of Multistage Self-Aligned Quadrupole Correction-Lens System

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