Post-thinning technique for a lifted-out membrane

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概要

• 論文の詳細を見る
• 2004-10-01

著者

• Iwasaki Koji

  R&d Department Sii Nanotechnology Inc.

• Sadayama Shoji

  R&d Department Sii Nanotechnology Inc.

• SADAYAMA Shoji

  SII NanoTechnology Inc.

• SUGIYAMA Yasuhiko

  SII NanoTechnology Inc.

• IWASAKI Koji

  SII NanoTechnology Inc.

• YASAKA Anto

  SII NanoTechnology Inc.

• Sugiyama Yasuhiko

  R&d Department Sii Nanotechnology Inc.

関連論文

• Surface Morphology of Diamond-Like Carbon Film and Si Wafer Milled with 30 keV Gallium Focused Ion Beam
• Deposition Yield and Physical Properties of Carbon Films Deposited by Focused-Ion-Beam Chemical Vapor Deposition
• A study of the damage on FIB-prepared TEM samples of Al_xGa_As
• Post-thinning technique for a lifted-out membrane
• High-Precision Quadrupole Correction Lens for Ion-Beam Focusing : Design and Test of Multistage Self-Aligned Quadrupole Correction-Lens System

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