A study of the damage on FIB-prepared TEM samples of Al_xGa_<1-x>As
スポンサーリンク
概要
- 論文の詳細を見る
- 2004-10-01
著者
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Yamamoto Yoh
R&d Department Sii Nanotechnology Inc.
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Yabuuchi Yasufumi
Characterization Technology Group Matsushita Technoresearch Inc.
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Yabuuchi Yasufumi
Characterization Technology Group Matsushita Technoresearch Inc
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INAZATO Sachiko
Characterization Technology Group, Matsushita Technoresearch, Inc
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TAMETOU Sayoko
Characterization Technology Group, Matsushita Technoresearch, Inc.
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OKANO Tetsuyuki
Characterization Technology Group, Matsushita Technoresearch, Inc.
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SADAYAMA Shoji
R&D Department, SII NanoTechnology, Inc.
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YAMAMOTO Yoh
R&D Department, SII NanoTechnology, Inc.
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IWASAKI Koji
R&D Department, SII NanoTechnology, Inc.
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SUGIYAMA Yasuhiko
R&D Department, SII NanoTechnology, Inc.
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Iwasaki Koji
R&d Department Sii Nanotechnology Inc.
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Tametou Sayoko
Characterization Technology Group Matsushita Technoresearch Inc.
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Sadayama Shoji
R&d Department Sii Nanotechnology Inc.
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Okano Tetsuyuki
Characterization Technology Group Matsushita Technoresearch Inc.
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Inazato Sachiko
Characterization Technology Group Matsushita Technoresearch Inc.
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Inazato Sachiko
Characterization Technology Group Matsushita Technoresearch Inc
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Sugiyama Yasuhiko
R&d Department Sii Nanotechnology Inc.
関連論文
- Failure analysis of laser diodes by SEM and TEM
- A study of the damage on FIB-prepared TEM samples of Al_xGa_As
- Post-thinning technique for a lifted-out membrane