Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states (Extended abstracts book of the International Workshop for Surface Analysis and Standardization '09 (iSAS-09))
スポンサーリンク
概要
著者
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Conard Thierry
Interuniversity Micro Electronics Center (imec)
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Kimura Kenji
Department Of Micro Engineering Kyoto University
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Nakamura Kunio
Department Of Micro Engineering Kyoto University
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Nakajima Kaoru
Department Of Micro Engineering Kyoto University
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Conard Thierry
Imec
関連論文
- Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states (Extended abstracts book of the International Workshop for Surface Analysis and Standardization '09 (iSAS-09))
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