Grazing Incidence-X-ray Fluorescence Spectrometry for the Compositional Analysis of Nanometer-Thin High-κ Dielectric HfO_2 Layers
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概要
著者
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Conard Thierry
Interuniversity Micro Electronics Center (imec)
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HELLIN David
Interuniversity Micro Electronics Center (IMEC)
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DELABIE Annelies
Interuniversity Micro Electronics Center (IMEC)
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PUURUNEN Riikka
Interuniversity Micro Electronics Center (IMEC)
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BEAVEN Peter
GKSS Forschungszentrum GmbH
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BRIJS Bert
Interuniversity Micro Electronics Center (IMEC)
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GENDT Stefan
Interuniversity Micro Electronics Center (IMEC)
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VINCKIER Chris
Katholieke Universiteit Leuven, Dept. of Chemistry
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Vinckier Chris
Katholieke Universiteit Leuven Dept. Of Chemistry
関連論文
- Combination of high-resolution RBS and angle-resolved XPS: accurate depth profiling of chemical states (Extended abstracts book of the International Workshop for Surface Analysis and Standardization '09 (iSAS-09))
- Analysis of Ultra-Thin HfO_2/SiON/Si(001) : Comparison of Three Different Techniques
- Grazing Incidence-X-ray Fluorescence Spectrometry for the Compositional Analysis of Nanometer-Thin High-κ Dielectric HfO_2 Layers
- As-Deposited Superconducting Thin Films by Electron Cyclotron Resonance-Assisted Laser Ablation for Application in Micro-Electronics