As-Deposited Superconducting Thin Films by Electron Cyclotron Resonance-Assisted Laser Ablation for Application in Micro-Electronics

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概要

• 論文の詳細を見る

• A method for the growth of as-deposited superconducting thin films which combines YAG-laser ablation and oxidation by an electron cyclotron resonance (ECR)-excited oxygen plasma is described. It is demonstrated by depositions on YSZ and SrTiO_3 substrates That this one-step method is compatible with the requirements of large surface homogeneity, low substrate temperature and low oxygen partial pressure. The method is therefore well suited for applications in micro-electronics.

• 社団法人応用物理学会の論文
• 1991-09-15

著者

• BRIJS Bert

  Interuniversity Micro Electronics Center (IMEC)

• Borghs G

  Imec Vzw Leuven Bel

• Borghs Gustaaf

  Interuniversitary Micro Electronics Center (imec)

• Brijs Bert

  Interuniversity Micro-electronics Center

• Van Mieghem

  Interuniversity Micro-electronics Center

• Vandervorst Wilfried

  Interuniversity Micro-electronics Center

• DENEFFE Kristin

  Interuniversity Micro-Electronics Center

• MERTENS Robert

  Interuniversity Micro-Electronics Center

関連論文

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• As-Deposited Superconducting Thin Films by Electron Cyclotron Resonance-Assisted Laser Ablation for Application in Micro-Electronics
• AlGaN/GaN/AlGaN Double Heterostructures on Silicon Substrates for High Breakdown Voltage Field-Effect Transistors with low On-Resistance
• Highly Efficient Room Temperature Spin Injection in a Metal-Insulator-Semiconductor Light-Emitting Diode

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