Effect of Low-Energy Ion Flux Irradiation on Synthesis of Superhard Nanocomposite Films
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
著者
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Li Zhuguo
School Of Materials Science And Engineering Shanghai Jiao Tong University
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Miyake Shoji
Liaison Center Kinki University
関連論文
- Effects of Copper Doping on Structure and Properties of TiN Films Prepared by Magnetron Sputtering Assisted by Low Energy Ion Flux Irradiation
- Effect of Low-Energy Ion Flux Irradiation on Synthesis of Superhard Nanocomposite Films
- Effects of Copper Doping on Structure and Properties of TiN Films Prepared by Magnetron Sputtering Assisted by Low Energy Ion Flux Irradiation
- Effect of Low-Energy Ion Flux Irradiation on Synthesis of Superhard Nanocomposite Films