Effects of Copper Doping on Structure and Properties of TiN Films Prepared by Magnetron Sputtering Assisted by Low Energy Ion Flux Irradiation

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-06-15

著者

• Li Zhuguo

  School Of Materials Science And Engineering Shanghai Jiao Tong University

• Miyake Shoji

  Liaison Center Kinki University

• WU Yixiong

  School of Materials Science and Engineering, Shanghai Jiao Tong University

関連論文

• Effects of Copper Doping on Structure and Properties of TiN Films Prepared by Magnetron Sputtering Assisted by Low Energy Ion Flux Irradiation
• Effect of Low-Energy Ion Flux Irradiation on Synthesis of Superhard Nanocomposite Films
• Effects of Copper Doping on Structure and Properties of TiN Films Prepared by Magnetron Sputtering Assisted by Low Energy Ion Flux Irradiation
• Effect of Low-Energy Ion Flux Irradiation on Synthesis of Superhard Nanocomposite Films

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