Etching of Ga-face and N-face GaN by Inductively Coupled Plasma

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概要

• 論文の詳細を見る
• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文

著者

• Iza Michael

  Electrical And Computer Engineering And Materials Departments University Of California

関連論文

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• Etching of Ga-face and N-face GaN by Inductively Coupled Plasma
• High Brightness Violet InGaN/GaN Light Emitting Diodes on Semipolar $(10\bar{1}\bar{1})$ Bulk GaN Substrates
• Hexagonal Truncated Pyramidal Light Emitting Diodes through Wafer Bonding of ZnO to GaN, Laser Lift-off, and Photo Chemical Etching

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