Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating
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概要
- 論文の詳細を見る
We propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of two-photon microfabrication and electroless plating. In this method, polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond pulsed laser. As a result, a metalized freely movable micropart whose motion is restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3D metallic microrotors by adjusting the experimental conditions of both electroless copper plating and laser ablation.
- 2012-06-25
著者
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Maruo Shoji
Department Of Mechanical Engineering And Materials Science Yokohama National University
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Ikegami Takashi
Department Of General Systems Sciences Graduate School Of Arts And Sciences The University Of Tokyo
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Ikegami Takashi
Department of Mechanical Engineering, Yokohama National University, Yokohama 240-8501, Japan
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Monaco Kathleen
Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742-4454, U.S.A.
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Maruo Shoji
Department of Mechanical Engineering, Yokohama National University, Yokohama 240-8501, Japan
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Stocker Michael
Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742-4454, U.S.A.
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Fourkas John
Department of Chemistry and Biochemistry, University of Maryland, College Park, MD 20742-4454, U.S.A.
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