Replication of Three-Dimensional Rotary Micromechanism by Membrane-Assisted Transfer Molding
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概要
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We report a method to replicate not only complex three-dimensional (3D) microstructures with closed loops but also a rotary microstructure restricted to a shaft by using a membrane-assisted transfer molding with a poly(dimethylsiloxane) (PDMS) mold. In this method, the use of supercritical CO2 drying allows the fabrication of a 3D master structure with partition membranes of submicron thickness by two-photon microfabrication. Because the membranes attached to the master structure separate the PDMS mold under closed loops, the PDMS mold can be released from the master structure that has closed loops or movable microparts. In particular, rotary micromechanisms such as microrotors and micromanipulators were replicated using a cylindrical partition membrane. It was also demonstrated that the replicated movable microparts can be driven in water. The movable microparts will be useful for microfluidic devices and as manipulation tools for biological samples.
- 2009-06-25
著者
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Maruo Shoji
Department Of Mechanical Engineering And Materials Science Yokohama National University
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Hasegawa Takuya
Department Of Applied Chemistry Graduate School Of Engineering Nagoya University
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Yoshimura Naoki
Department Of Cardiothoracic Surgery Kobe Children's Hospital
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Maruo Shoji
Department of Mechanical Engineering, Graduate School of Engineering, Yokohama National University, Yokohama 240-8501, Japan
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