Non-Core–Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition

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概要

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• Nano- and microstructures fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) have a core–shell structure caused by the scattering profiles of Ga ions and secondary electrons (SEs). This structural characteristic makes it difficult to design functions of nano-electromechanical devices. Therefore, non-core–shell structure deposition by the control of SE emission was examined to facilitate the function design of nanoelectromechanical devices. Non-core–shell structure deposition was achieved by applying voltage during carbon nanostructure growth. We also evaluated the growth characteristics of non-core–shell structure deposition. We found that the growth rate of a nanostructure did not change when voltage was applied. Furthermore, we evaluated the mechanical material characteristics (density and Young’s modulus) of a non-core–shell structure by measuring of the resonant frequency shift of a Si cantilever using the electron beam method. We found that the non-core–shell structure had a high density (6.5 g/cm3) and a high Young’s modulus (800 GPa). These results indicate that the technique for non-core–shell structure deposition is useful in achieving nanoelectromechanical devices.

• 2010-06-25

著者

• Ishihara Sunao

  The University Of Tokyo

• Kometani Reo

  The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8658, Japan

• Reo Kometani

  The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8658, Japan

• Sunao Ishihara

  The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8658, Japan

• Shin'ichi Warisawa

  The University of Tokyo, 7-3-1 Hongo, Bunkyo, Tokyo 113-8658, Japan

関連論文

• Graphite Shell Film Formation Induced by Eduction Phenomenon of Ga Implanted by Focused Ion Beam
• Photomask Data Prioritization Based on VLSI Design Intent and Its Utilization for Mask Manufacturing
• Non-Core–Shell Nanostructure Deposition on Focused-Ion-Beam Chemical Vapor Deposition
• Three-Dimensional Nanostructure Fabrication by Controlling Downward Growth on Focused-Ion-Beam Chemical Vapor Deposition
• Evaluation of Thermal–Mechanical Vibration Amplitude and Mechanical Properties of Carbon Nanopillars Using Scanning Electron Microscopy
• Height Dependence of Young's Modulus for Carbon Nanopillars Grown by Focused-Ion-Beam-Induced Chemical Vapor Deposition

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