High Speed Six-Transistor Static Random Access Memory Cells Using Single Grain Thin Film Transistors Fabricated at Low Temperature Process
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概要
- 論文の詳細を見る
In this paper we will report successfully fabricated six transistor static random access memory (6T SRAM) cells using single-grain thin film transistors (TFTs). SRAM cells have been designed by analytical calculations and verified by DC and transient simulations. TFTs are fabricated by $\mu$-Czochralski process that consists of making grain filter and Excimer laser crystallization at temperatures below 550 °C. The gate length of transistors are 2 μm. Fabricated SRAM cells based on single grain TFTs, show good read and write static noise margin (SNM and WNM) equal to 0.55 and 0.75 V at 3.3 V power supply, respectively. Finally, excellent read and write access times equal to 13 and 8 ns in 87 MHz worldline frequency were obtained.
- 2010-03-25
著者
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ISHIHARA Ryoichi
Delft Institute of Microelectronics and Submicron Technology (DIMES), Delft University of Technology
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Jaber Derakhshandeh
Delft University of Technology, Delft Institute of Microsystems and Nanoelectronics (DIMES), ECTM, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands
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Golshani Negin
Delft University of Technology, Delft Institute of Microsystems and Nanoelectronics (DIMES), ECTM, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands
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Derakhshandeh Jaber
Delft University of Technology, Delft Institute of Microsystems and Nanoelectronics (DIMES), ECTM, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands
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Cees I.
Delft University of Technology, Delft Institute of Microsystems and Nanoelectronics (DIMES), ECTM, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands
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Negin Golshani
Delft University of Technology, Delft Institute of Microsystems and Nanoelectronics (DIMES), ECTM, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands
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Ryoichi Ishihara
Delft University of Technology, Delft Institute of Microsystems and Nanoelectronics (DIMES), ECTM, Feldmannweg 17, P. O. Box 5053, 2600 GB Delft, The Netherlands
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