Noncontact Self-Running Ultrasonically Levitated Two-Dimensional Stage Using Flexural Standing Waves

概要

論文の詳細を見る
A noncontact self-running ultrasonically levitated two-dimensional (2D) stage is discussed. The proposed 2D stage was fabricated from a rectangular aluminum plate and four vibrating plates were integrated. The vibrating plates are cantilever-type plates and piezoelectric zirconate titanate (PZT) elements are attached on their fixed ends. To isolate the performance of each vibrating plate, the four vibrating plates have different lengths of 27, 28, 29, and 30 mm. The 2D stage could be levitated at several frequencies from 60 to 80 kHz. The stage could move in the negative $x$-direction at 71 kHz, at which the flexural vibration mode was excited on the 30-mm-long vibrating plate. Likewise, the stage could move in the negative $y$-, positive $x$-, and positive $y$-directions at 72, 74, and 77 kHz with the flexural vibration mode on the 29-, 28-, and 27-mm-long vibration plates, respectively. A maximum thrust of 6.3 mN could be obtained at 74 kHz with 70 Vpp.
2009-07-25