Fabrication of a Slotted SiO2 Film/Embedded Grating Electrodes/128° YX-LiNbO3 Structure

スポンサーリンク

概要

• 論文の詳細を見る

• In this paper, we describe the fabrication of Al grating electrodes embedded in a slotted SiO2 film on a 128° YX-LiNbO3 substrate in order to control both reflection characteristics and the temperature coefficient of frequency (TCF) of surface acoustic wave (SAW) devices. First, the fabrication process is discussed. It is shown that the combined usage of ion milling and reactive ion etching enables independent control of the thicknesses of the slotted SiO2 film and grating electrodes to be embedded in the slots. Next, the process is applied to the fabrication of an SAW transversal filter, showing the possibility of controlling the reflection characteristics and TCF independently.

• 2009-07-25

著者

• Omori Tatsuya

  Department Of Electronics And Mechanical Engineering Faculty Of Engineering Chiba University

• Yamaguchi Masatsune

  Department Of Dentistry And Oral Surgery Tokyo Metropolitan Geriatric Center

• Hashimoto Ken-ya

  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan

• Konishi Kumiko

  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan

• Omata Akitoshi

  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan

• HASHIMOTO Ken-ya

  Department of Electrical and Electronic Engineering, Chiba University

• Omori Tatsuya

  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan

• OMORI Tatsuya

  Department of Electrical and Electronic Engineering, Chiba University

• Yamaguchi Masatsune

  Department of Electrical and Electronic Engineering, Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan

関連論文

• Replacement of Factor XIII in an 89-year-old patient with persistent post-extraction bleeding
• High-Speed Laser Probing System for Surface Acoustic Wave Devices Based on Knife-Edge Method
• Ultra-Wideband Surface Acoustic Wave Devices Using Cu-Grating/Rotated-YX-LiNbO_3-Substrate Structure
• Analysis of Excitation and Propagation Characteristics of Leaky Modes in Surface Acoustic Wave Waveguides
• Preparation of piezoelectric PZT micro-discs by sol-gel method
• Effects of Dielectric Overlay upon Surface Acoustic Wave Propagation under Metallic Grating Structure
• Polynomial Approximation of SAW Reflection Characteristics for Fast Device Simulation Tools
• Acousto-Optic Bragg Diffraction by Deep Bulk Acoustic Waves for Use in Optic Spectrum Analyser : Photoacoustic Spectroscopy
• Propagation Characteristics of SAW on a ZnO/SiO_2/high-velocity-substrate Structure : SAW and Communication Devices
• Effect of Surface Electrical Boundary Condition on Temperature Stability of SAW Devices : SAW and Communication Devices
• Accuracy of Gates RF Pulse Measurement : Acoustical Measurements and Instrumentation
• Lamb Wave Devices Employing ZnO-Film/Al-Foil Composite Structure : SAW and Communication Device
• Ultrasonic Transducer Employing a ZnO-film/Al-foil Composite Structure for Non-Destructive Testing : Ultrasonic Transduction
• Surface Acoustic Wave Propagation Characterisation by Finite-Element Method and Spectral Domain Analysis
• Single-Phase Unidirectional Surface Acoustic Wave Transducer Using Cu Electrode
• High-Frequency Operation for Resin-Coated BAW Beam Devices : SAW and Communication Devices
• Automated Acousto-Optic Measurement System of Bluk Acoustic Waves Launched from an IDT : Acoustical Measurements and Instrumentation
• Thin-Film Bulk Acoustic Resonators Employing ZnO/Pyrex-Glass Composite Diaphragm Structure
• Composite Diaphragm Ultrasonic Transducers Employing Air-Gap Structure
• Development of Diagnosis System for SAW Devices Based upon Spectrogramme Analysis : SAW and Communication Device
• Ultrasonic Properties of Lead Zirconate Titanate Thin Films in UHF-SHF Range
• Liquid Streaming by High-Frequency Ultrasonic Waves
• Case of bone Paget's disease with cheek pain, hearing loss and tremor whose histological findings showed peculiar calcified structures
• Discrete Green Function Theory for Multi-Electrode Interdigital Tansducers
• Behaviour of Leaky Surface Acoustic Wave Propagation at Discontinuous Region of Periodic Grating
• Analysis of Surface Acoustic Waves Obliquely Propagating under Metallic Gratings with Finite Thickness
• Elderly women with oral exostoses had higher bone mineral density
• Effective Electromechanical Coupling to Leaky SAW on 36°YX-LiTaO_3 : SAW and BAW Materials, Devices and Theories
• Boundary Element Method Analysis of Interdigital Transducers Having Arbitrary Metallisation Ratio : SAW and Communication Devices
• High Performance Ultrasonic Transducers Employing ZnO/Pyrex-glass Diaphragm Structure on a Si Substrate : Ultrasonic Transduction
• Estimation of Elastic Constants, Mass Density and Thickness of Thin Films from SAW Velocity Dispersion : SAW and Communication Devices
• High-Speed Laser Probing System for Surface Acoustic Wave Devices Based on Knife-Edge Method
• Bleustein-Gulyaev-Shimizu Wave Propagating under Metallic Gratings of Finite Thickness
• Highly Piezoelectric Shear-Horizontal-Type Boundary Waves
• ZnO-Film/Si-Diaphragm Underwater Ultrasonic Transducers : Ultrasonic Transduction
• A Design of Single Symbol Decodable QO-STBC with Full Diversity (通信方式)
• Fabrication of a Slotted SiO2 Film/Embedded Grating Electrodes/128° YX-LiNbO3 Structure
• A Design of Single Symbol Decodable QO-STBC with Full Diversity
• A Design of Single Symbol Decodable QO-STBC with Full Diversity
• A Design of Single Symbol Decodable QO-STBC with Full Diversity
• Effects of Dielectric Overlay upon Surface Acoustic Wave Propagation under Metallic Grating Structure
• Effects of RF Filters on Performance of Power Amplifiers
• Improvement of Detection System for a Fast-Scanning and Phase-Sensitive Laser Probe for Surface Acoustic Wave Devices in 2 GHz Range
• Single-Phase Unidirectional Surface Acoustic Wave Transducer Using Cu Electrode
• Low-Loss and Constant-Group-Delay Surface Acoustic Wave Filters Employing Cu-Based Resonant Single-Phase Unidirectional Transducers
• Single Symbol Decodable QO-STBC with Full Diversity
• Early Days of SH-type Surface Acoustic Wave Research
• A Design of Single Symbol Decodable QO-STBC with Full Diversity
• A Design of Single Symbol Decodable QO-STBC with Full Diversity

もっと見る 閉じる

スポンサーリンク