Effects of Dielectric Overlay upon Surface Acoustic Wave Propagation under Metallic Grating Structure

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概要

• 論文の詳細を見る

• This paper describes surface acoustic wave (SAW) propagation under a periodic metallic grating structure overlaid with an SiO2 film. An analysis was made by modifying the software FEMSDA, in which the finite element method is applied to both the grating electrodes and SiO2 overlay. For Rayleigh-type SAW propagating on 128$^\circ$YX-LiNbO3, changes in the reflection coefficient and effective velocity are calculated as a function of the SiO2 film thickness overlaying an Al grating structure. It is shown that the SiO2 film overlaying the top surface of the grating electrodes affects both the SAW reflection coefficient and effective SAW velocity more significantly than the film overlaying the electrode gaps.

• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 2001-05-30

著者

• Omori Tatsuya

  Department Of Electronics And Mechanical Engineering Faculty Of Engineering Chiba University

• Hashimoto Ken-ya

  Department Of Electrical And Electronics Engineering Chiba University

• Yamaguchi Masatsune

  Department Of Dentistry And Oral Surgery Tokyo Metropolitan Geriatric Center

• Kondo Shintaro

  Graduate School Of Science And Technology Chiba University

• Kondo Shintaro

  Graduate School of Science and Technology, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi 263-8522, Japan

• Hashimoto Ken-ya

  Department of Electronics and Mechanical Engineering, Faculty of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi 263-8522, Japan

• HASHIMOTO Ken-ya

  Department of Electrical and Electronic Engineering, Chiba University

• OMORI Tatsuya

  Department of Electrical and Electronic Engineering, Chiba University

• Yamaguchi Masatsune

  Department of Electronics and Mechanical Engineering, Faculty of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba-shi 263-8522, Japan

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