A Micromachined Flexible Hollow Cathode Discharge Device
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概要
- 論文の詳細を見る
This paper presents the fabrication and test of a flexible hollow cathode discharge device. The discharge device consists of three layers; a thin anode layer, an insulation layer and a hollow cathode layer. The hollow cathode discharge is characterized by its high current density. The discharge device is fabricated by micromachining technology. The anode and cathode are made of aluminum and nickel, respectively. Polyimide is chosen as an insulating material because of its excellent dielectric properties and good mechanical stability. The device has an array of $10 \times 10$ holes for the discharge. The hole diameter and depth are 70 and 110 μm, respectively. The size of the flexible discharge device is $9 \times 9 \times 0.13$ mm3. The discharge test was performed in an argon gas chamber at room temperature. The current is measured during the discharge at various applied voltages. At a pressure of 510 Torr, the discharge appears at an operating voltage of 270 V. The discharge is also observed at atmospheric pressure.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-06-25
著者
-
Oh Soo-ghee
Department Of Physics Ajou University
-
Yang Sang
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, Korea
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Kim Kang-il
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, Korea
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Kim Geunyoung
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, Korea
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