Simple Atmospheric-Pressure Nonthermal Plasma-Jet System for Poly(dimethylsiloxane) Bonding Process
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概要
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In this paper, we propose a simple nonthermal plasma-jet system operated at atmospheric pressure. To evaluate the capability of surface modification, we performed an experimental study on the surface modification of poly(dimethylsiloxane) (PDMS) using Ar, He, and N2 plasma jets. The contact angles of a water droplet were measured after the surface modification by the proposed system. Among the three types of plasma used, the nitrogen plasma is the most efficient for surface modification. The N2 plasma-jet treatment for 60 s decreased the contact angle of PDMS to about 30°. The hydrophilic property of the modified surface lasted for at least 3 days. The PDMS modified with the nitrogen plasma is bonded well with glass. The bonding strength is equivalent to the yield strength of PDMS.
- 2012-06-25
著者
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Yang Sang
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, Korea
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Yang Sang
Department of Electrical and Computer Engineering, Ajou University, Suwon, Gyeonggi 443-749, Republic of Korea
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Park Tae-Gyu
Korea Bio-IT Foundry Center, IAMD, Seoul National University, Seoul 151-742, Republic of Korea
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Kim Kangil
Department of Electrical and Computer Engineering, Ajou University, Suwon 443-749, Korea
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Han Dong
Korea Bio-IT Foundry Center, IAMD, Seoul National University, Seoul 151-742, Republic of Korea
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Kim Kangil
Department of Electrical and Computer Engineering, Ajou University, Suwon, Gyeonggi 443-749, Republic of Korea
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Kim Geunyoung
AMED Inc., Seoul 151-742, Republic of Korea
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Oh Yeongtaek
AMED Inc., Seoul 151-742, Republic of Korea
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