Fabrication of Megasonic-Agitated Module for Improving the Characteristics of Wet Etching
スポンサーリンク
概要
- 論文の詳細を見る
The megasonic-agitated module (MAM) has been fabricated for improving the characteristics of wet etching. The characteristics of the MAM were investigated during the wet etching with and without megasonic agitation in this study. The use of the MAM has improved the characteristics of wet etching, such as the etch rate, etch uniformity, and surface roughness. Particularly, the etching uniformity on the entire wafer was less than $\pm 1$% in both cases of Si and glass. Generally, the initial root-mean-square roughness ($R_{\text{rms}}$) of the single-crystal silicon is less than 0.5 nm. Roughnesses of 566 and 66 nm were achieved with magnetic stirring and ultrasonic agitation respectively, by some researchers. In this study, the roughness of the etched Si surface was less than 60 nm. Wet etching of silicon with megasonic agitation can maintain nearly the original surface roughness during etching. The results confirmed that megasonic agitation is an effective way to improve the etching characteristics, such as the etch rate, etch uniformity and surface roughness, and that the developed micromachining system is suitable for the fabrication of devices with complex structures.
- 2008-06-25
著者
-
Kim Jae
Korea Aerospace Research Institute
-
PARK Tae
Korea Medical Insurance Corporation
-
Yang Sang
School of Electronics and Computer Engineering, College of Information Technology, Ajou University, Paldal-gu, Suwon 442-749, Korea
-
Jung Seng
Korea Bio-IT Foundry Seoul Center, Institute of Advanced Machinery and Design, Seoul National University, Kwanak-gu, Seoul 151-742, Korea
-
Song Hye
Korea Bio-IT Foundry Seoul Center, Institute of Advanced Machinery and Design, Seoul National University, Kwanak-gu, Seoul 151-742, Korea
-
Chang Jun
Korea Bio-IT Foundry Seoul Center, Institute of Advanced Machinery and Design, Seoul National University, Kwanak-gu, Seoul 151-742, Korea
-
Han Dong
Korea Bio-IT Foundry Seoul Center, Institute of Advanced Machinery and Design, Seoul National University, Kwanak-gu, Seoul 151-742, Korea
-
Park Tae
Korea Bio-IT Foundry Seoul Center, Institute of Advanced Machinery and Design, Seoul National University, Kwanak-gu, Seoul 151-742, Korea
-
Han Dong
Korea Bio-IT Foundry Center, IAMD, Seoul National University, Seoul 151-742, Republic of Korea
-
Kim Jae
Korea Bio-IT Foundry Seoul Center, Institute of Advanced Machinery and Design, Seoul National University, Kwanak-gu, Seoul 151-742, Korea
関連論文
- ICONE11-36344 The SPOOM-EDM Method for Assessing Organizational
- Syntheses of 1β-Methylcarbapenems Bearing 5-Methyl-4-hydroxypyrrolidinone
- Dietary Calcium and 1,25-Dihydroxyvitamin D_3 Regulate Transcription of Calcium Transporter Genes in Calbindin-D9k Knockout Mice
- Prevalence of hepatitis B and C virus infection among adults in Korea
- F202 MULTI-STAGE MODEL FOR INDIRECT INTERNAL REFORMING TYPE SOLID OXIDE FUEL CELLS
- Transport of Volatile Organic Compounds through a Tire Powder Specimen (第11回廃棄物学会研究発表会) -- (Waste Management Planning, Waste Generation, Recycling)
- Numerical Analysis of Coalescence Characteristics of Low Melting Point Alloy Fillers Using a Non-Equilibrium Phase Field Model
- One-pot Synthesis of α,α-Dichloroketones from Alkynes Using the N,N-Dimethylformamide/HC1/Potassium Monoperoxysulfate System
- Control of Hydraulic Conductivity and Chromium Mobility in Soil-Drilling Fluid Mixtures by Polyacrylamide
- Soil characteristics and phosphorus accumulation in surface soil in relation to geological and land-use conditions(Soil Chemistry and Mineralogy)
- Control of Hydraulic Conductivity and Chromium Mobility in Soil-Drilling Fluid Mixtures by Polyacrylamide (Environment)
- Light Extraction Enhancement of GaN-Based Light-Emitting Diodes Using Volcano-Shaped Patterned Sapphire Substrates
- Fabrication of Megasonic-Agitated Module for Improving the Characteristics of Wet Etching
- Simple Atmospheric-Pressure Nonthermal Plasma-Jet System for Poly(dimethylsiloxane) Bonding Process
- Comparison of Chemical Vapor Sensing Properties between Graphene and Carbon Nanotubes
- Dietary Calcium and 1,25-Dihydroxyvitamin D3 Regulate Transcription of Calcium Transporter Genes in Calbindin-D9k Knockout Mice