Surface Structure with High-Density Nanodots Formed by Pulse Nucleation Method Using Monomethylgermane

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概要

• 論文の詳細を見る

• Nanodots were formed at a high density on a Si(001) substrate, which is misoriented toward [110] azimuth by 2°, by pulse nucleation using monomethylgermane (MMGe). This method involves alternating the substrate temperature between low and high temperatures. The surface reaction and nanodot formation were analyzed at an atomic level by scanning tunneling microscopy (STM) and reflection high-energy electron diffraction (RHEED). The STM analysis confirmed that uniform nanodots were successfully formed on the surface at a density of $1.3 \times 10^{12}$ cm-2, and that they had an average diameter of 6 nm. The coexistence of both Ge and SiC nanodots was confirmed by RHEED when high-pressure reaction conditions were used.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-07-25

著者

• Yasui Kanji

  Faculty Of Engineering Nagaoka University Of Technology

• Akahane Tadashi

  Faculty Of Engineering Nagaoka University Of Technology

• Takata Masasuke

  Faculty Of Engineering Nagaoka University Of Technology

• Nishiyama Hiroshi

  Faculty Of Engineering Nagaoka University Of Technology

• Nishiyama Hiroshi

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Ogiwara Tomoaki

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Kanemaru Tetsushi

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Inoue Yasunobu

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Yasui Kanji

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Akahane Tadashi

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

• Takata Masasuke

  Faculty of Engineering, Nagaoka University of Technology, 1603-1 Kamitomioka, Nagaoka, Niigata 940-2188, Japan

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