Demonstration of Secondary Electron Detection using Monolithic Multi-Channel Electron Detector

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概要

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• To check the feasibility of the detection scheme of a distributed-axis, fixed-aperture system, secondary electron detection using a monolithic multi-channel electron detector, which has a through-hole for primary beamlet transmittance on each detection area, was demonstrated. An experimental setup consisting of a sample, quadrupole deflector, field terminator and detector was mounted on a stage of a scanning electron microscope, and the distributions of the secondary electrons at the detection plane were measured by three neighboring channels. The deflection of the secondary electrons was also experimentally checked. The results exhibited good agreement with simulated predictions. We conclude that the landing area of secondary electrons from one primary beamlet will be confined to one corresponding channel of the monolithic multi-channel electron detector with an axial magnetic field on the order of 0.1 T.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2008-06-25

著者

• PEASE R.

  Stanford University

• Tanimoto Sayaka

  Hitachi, Ltd., Central Research Laboratory, Kokubunji, Tokyo 185-8601, Japan

• Pickard Daniel

  National University of Singapore, Singapore 117576, Singapore

• Kenney Chris

  Molecular Biology Consortium, Chicago, IL 60527, U.S.A.

• Hasi Jasmine

  University of Manchester, Manchester M13 9PL, U.K.

• Pease R.

  Stanford University, Stanford, CA 94305, U.S.A.

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• Demonstration of Secondary Electron Detection using Monolithic Multi-Channel Electron Detector

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