PEASE R. | Stanford University
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概要
関連著者
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PEASE R.
Stanford University
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OWEN Geraint
Hewlett Packard Co.
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Owen G
Hewlett Packard Co.
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GRENVILLE Andrew
Stanford University
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BUNAU Rudolf
Stanford University
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JEONG Hwan
Ultratech Stepper Inc.
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MARKLE David
Ultratech Stepper Inc.
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Jeong H
Ultratech Stepper Inc.
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Owen Geraint
Hewlett-packard Co.
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Bunau Von
Stanford University
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Tanimoto Sayaka
Hitachi, Ltd., Central Research Laboratory, Kokubunji, Tokyo 185-8601, Japan
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Pickard Daniel
National University of Singapore, Singapore 117576, Singapore
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Kenney Chris
Molecular Biology Consortium, Chicago, IL 60527, U.S.A.
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Hasi Jasmine
University of Manchester, Manchester M13 9PL, U.K.
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Pease R.
Stanford University, Stanford, CA 94305, U.S.A.
著作論文
- The Effect of Gaps in Markle-Dyson Optics for Sub-Quarter-Micron Lithography
- Optimization of Pupil Filters for Increased Depth of Focus
- Demonstration of Secondary Electron Detection using Monolithic Multi-Channel Electron Detector