Thin-Film Transistor and Ultra-Large Scale Integrated Circuit: Competition or Collaboration

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概要

• 論文の詳細を見る

• Thin-film transistor (TFT) and ultra-large scale integrated circuit (ULSIC) have been compared and discussed with respect to the development history, technology trends, and applications. Detailed issues on materials, processes, and devices in the large-area TFT array fabrication and nano-size metal–oxide–semiconductor field effect transistors (MOSFETs) composed ULSIC on large wafers were also examined. The TFT fabrication processes were originally derived from ULSIC. However, there are many unique large-area processes and theories developed during the study of the TFT array fabrication, which can greatly benefit the future large wafer ULSIC production process. Although their future applications will be in different areas, there are opportunities that TFTs can be integrated into ULSIC products to enhance the functions and performance.

• 2008-03-25

著者

• Kuo Yue

  Thin Film Microelectronics Research Laboratory Department Of Chemical Engineering Texas A&m Univ

• Kuo Yue

  Thin Film Nano and Microelectronics Research Laboratory, Texas A&M University, College Station, TX 77843-3122, U.S.A.

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