Activation of p-Type Dopants in 4H–SiC Using Hybrid Super-Rapid Thermal Annealing Equipment
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概要
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Rapid thermal annealing (RTA) on areas with diameters as large as 2 in. at high temperatures using hybrid super-RTA (HS-RTA) equipment is performed in this study. The HS-RTA equipment consists of an infrared annealing unit and an RF induction annealing unit for uniform annealing over a 2-in.-$\phi$ susceptor. As a result of annealing using the HS-RTA equipment, temperature is elevated from RT to a high temperature (1600–1800 °C) for less than 1 min. Using aluminum (Al)-implanted silicon carbide (SiC) samples, the performance of the HS-RTA equipment is evaluated. For Al-implanted samples annealed at 1700 °C, the sheet resistance distribution on the 2-in.-$\phi$ susceptor is 8.0%.
- 2007-08-15
著者
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Senzaki Junji
National Inst. Advanced Industrial Sci. And Technol. Ibaraki Jpn
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Harada Shinsuke
National Institute Of Advanced Industrial Science And Technology Power Electronics Research Center:u
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Suzuki Kenji
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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FUKUDA Kenji
National Institute of Advanced Industrial Science and Technology, Power Electronics Research Center
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Kinoshita Akimasa
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Katou Makoto
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Okamato Mitsuo
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Nishizawa Shin-ichi
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Morigasa Fukuyoshi
THERMO RIKO Co., Ltd., Mitaka, Tokyo 181-0013, Japan
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Endou Tomoyoshi
THERMO RIKO Co., Ltd., Mitaka, Tokyo 181-0013, Japan
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Isii Takuo
Nippon Thermonics Co., Ltd., Sagamihara, Kanagawa 229-1125, Japan
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Yashima Teruyuki
Nippon Thermonics Co., Ltd., Sagamihara, Kanagawa 229-1125, Japan
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Fukuda Kenji
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Harada Shinsuke
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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Suzuki Kenji
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8568, Japan
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