Micro-Thermoelectric Hydrogen Sensor of Three Different Membrane Structures

概要

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We prepared micro-thermoelectric hydrogen sensors (micro-THSs) operating with a combination of the thermoelectric effect of SiGe thin film and Pt-catalyzed exothermic hydrogen oxidation of the catalyst. The membrane area of each sensor was heated by a micro heater. The responses of the micro-THSs with three different types of membranes to hydrogen in air were investigated. The micro-THS with a single membrane, which had a better thermal isolation than those of other membranes, reduced the power consumption of 251 mW and the time required to heat the membrane by 5 s. This micro-THS with a single membrane showed the optimal gas sensing property of voltage signal of 1.13 mV for 1% hydrogen in air with the low detection limit of 50 ppm.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-08-15