Optical Absorption Spectra of Hydrogenated Microcrystalline Silicon Films by Resonant Photothermal Bending Spectroscopy

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概要

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• A resonant photothermal bending spectroscopy (PBS) is demonstrated for the measurement of absorption coefficient spectra in hydrogenated microcrystalline silicon (μc-Si:H) and hydrogenated microcrystalline cubic silicon carbide (μc-3C–SiC:H) films. The resonant vibration technique utilized in PBS establishes the sensitivity as $\alpha d\sim 5\times 10^{-5}$ in a vacuum measurement. Appling resonant PBS to μc-Si:H films, a new extra absorption coefficient $\alpha_{\text{ex}}$ spectrum is observed from 0.6 to 1.2 eV. The $\alpha_{\text{ex}}$ spectrum has a peak at ${\sim}1.0$ eV, and the localized states inducing the $\alpha_{\text{ex}}$ are located ${\sim}0.35$ eV below the conduction band edge of μc-Si:H. A possible explanation for the observed localized state is that an oxidation produces weak bonds at the grain boundaries and/or amorphous silicon tissues. In μc-3C–SiC:H film, an optical band-gap energy of ${\sim}2.2$ eV was demonstrated assuming an indirect optical transition. The temperature coefficient of the optical band-gap energy was ${\sim}2.3\times 10^{-4}$ eV K-1. The $\alpha_{\text{ex}}$ spectrum of μc-3C–SiC:H film is plateau-shaped and its magnitude is in accord with an increase in grain size.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-05-15

著者

• Nonomura Shuichi

  Environmental And Renewable Energy Systems Division Graduate School Of Engineering Gifu University

• Yoshida Norimitsu

  Environmental and Renewable Energy Systems Division, Graduate School of Engineering, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan

• Kunii Toshie

  Environmental and Renewable Energy Systems Division, Graduate School of Engineering, Gifu University, 1-1 Yanagido, Gifu 501-1193, Japan

• Hori Yasuro

  Intelligent Mechanical Engineering Course, Department of Mechanical Engineering, Aichi Institute of Technology, 1247 Yachigusa, Yakusa-cho, Toyota, Aichi 470-0392, Japan

• Nonomura Shuichi

  Environment and Renewable Energy Systems, Gifu University, Gifu 501-1193, Japan

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• Heterojunction Amorphous Silicon Solar Cells with n-Type Microcrystalline Cubic Silicon Carbide as a Window Layer
• Optical Absorption Spectra of Hydrogenated Microcrystalline Silicon Films by Resonant Photothermal Bending Spectroscopy
• Effects of Substrate Temperature on Properties of Amorphous In

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