Demonstrating Applications of Non-optically Regulated Tapping-Mode Near-Field Scanning Optical Microscopy to Nano-optical Metrology and Optical Characterization of Semiconductors

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概要

• 論文の詳細を見る

• We demonstrate the applications of a near-field scanning optical microscopy (NSOM) system based on a short-probe tapping-mode tuning fork (TMTF) configuration to nano-optical metrology and the optical characterization of semiconductors. The short-probe TMTF–NSOM system is constructed to operate in both collection and excitation modes, in which a cleaved short fiber probe attached to one tine of the tuning fork is used as a light collector/emitter as well as a force-sensing element. Interference fringes due to standing evanescent waves generated by total internal reflection are imaged in the collection mode. Excitation-mode short-probe TMTF–NSOM is applied to near-field surface photovoltage measurement on distributed-Bragg-reflector-enhanced absorbing substrate AlGaInP light-emitting diode structures.

• Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
• 2006-03-15

著者

• Tsai Din

  Department Of Physics And Center For Nanostorage Research National Taiwan University

• Huang Hung

  Department Of Photonics & Institute Of Electro-optical Engineering National Chiao Tung Universit

• Huang Ying

  Department of Electronic Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan

• Chiang Hai-Pang

  Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan, R.O.C.

• Tsai Din

  Department of Physics, National Taiwan University, Taipei 10617, Taiwan, R.O.C.

• Lu Nien

  Department of Electronic Engineering, De Lin Institute of Technology, Taipei County 23646, Taiwan, R.O.C.

• Chang Shuen

  Institute of Optoelectronic Sciences, National Taiwan Ocean University, Keelung 202, Taiwan, R.O.C.

• Huang Guan-Bin

  Department of Electronic Engineering, National Taiwan University of Science and Technology, Taipei 106, Taiwan, R.O.C.

• Huang Hung

  Department of Physics, National Taiwan University, Taipei 10617, Taiwan, R.O.C.

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