Impact of Radiation-Induced Back-Channel Leakage and Back-Gate Bias on Drain Current Transients of Thin-Gate-Oxide Partially Depleted Silicon-On-Insulator n-channel Metal–Oxide–Semiconductor Field-Effect Transistors
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概要
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In this study, we analyze the impact of back-channel radiation-induced leakage and back-gate bias on switch-off drain current transients of thin-gate-oxide partially depleted (PD) silicon-on-insulator (SOI) n-channel metal–oxide–semiconductor field-effect transistors (MOSFETs). The presence of radiation-induced positive trapped charges in the buried oxide after 60 MeV proton irradiation is found to reduce the “switch-off” transient times for gate voltages above and below the front-gate threshold voltage for body-to-gate electron valence band tunnelling. An increase in steady-state drain current and an increase in the amplitude of weak inversion drain current transients are observed. A similar effect is observed when applying a positive bias to the back-gate, which is found to generate an “irradiation-like” subthreshold leakage. The observed switch-off drain current transient behavior is explained by taking into account an edge parasitic back-channel transient component, which is added to the conventional front-gate drain current transient.
- 2004-12-15
著者
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Rafi Joan
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Claeys Cor
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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Rafí Joan
IMEC, Kapeldreef 75, Leuven B-3001, Belgium
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Hayama Kiyoteru
IMEC, Kapeldreef 75, Leuven B-3001, Belgium
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Mercha Abdelkarim
IMEC, Kapeldreef 75, Leuven B-3001, Belgium
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Simoen Eddy
IMEC, Kapeldreef 75, Leuven B-3001, Belgium
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Simoen Eddy
IMEC, Kapeldreef 75, B-3001 Leuven, Belgium
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- Effective Work Function Engineering for Aggressively Scaled Planar and Multi-Gate Fin Field-Effect Transistor-Based Devices with High-k Last Replacement Metal Gate Technology
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