Compact Coating Machine for Large Laser Optics with a New Thickness-Distribution Equalization Method
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概要
- 論文の詳細を見る
A compact coating machine with which large optics up to 1000 mm in diameter and 300 kg in weight can be coated uniformly is presented. In order to achieve a uniform thickness distribution within the compact coating chamber, we devised a new thickness equalization method that utilizes a rotating mask between an evaporation source and a large rotating optics at the center of the coating chamber.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2004-01-15
著者
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Otani Minoru
Canon Inc. Optics R&d Center
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Ishikura Junri
Canon Inc. Optics R&d Center
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Fujimura Hidehiko
Canon Inc. Optics R&d Center
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Yoshida Kunio
Department Of Chemical Engineering University Of Tokyo
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Otani Minoru
Canon Inc., Optics R&D Center, 23-10 Kiyohara-Kogyodanchi, Utsunomiya,Tochigi 321-3298, Japan
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Fujimura Hidehiko
Canon Inc., Optics R&D Center, 23-10 Kiyohara-Kogyodanchi, Utsunomiya,Tochigi 321-3298, Japan
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Ishikura Junri
Canon Inc., Optics R&D Center, 23-10 Kiyohara-Kogyodanchi, Utsunomiya,Tochigi 321-3298, Japan
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Yoshida Kunio
Department of Electronics, Information and Communication Technologies, Osaka Institute of Technology, 5-16-1 Ohmiya, Asahi-ku, Osaka 535-8585, Japan
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