Compact Coating Machine for Large Laser Optics with a New Thickness-Distribution Equalization Method
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概要
- 論文の詳細を見る
- 2004-01-15
著者
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FUJIMURA Hidehiko
Canon Inc., Optics R&D Center
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ISHIKURA Junri
Canon Inc., Optics R&D Center
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Otani Minoru
Canon Inc. Optics R&d Center
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Yoshida Kunio
Department Of Electronics Information And Communication Engineering Osaka Institute Of Technology
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Ishikura Junri
Canon Inc. Optics R&d Center
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Fujimura Hidehiko
Canon Inc. Optics R&d Center
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