Estimation and Correction Procedure for the Effects of Surface Roughness on Electron Probe Microanalysis
スポンサーリンク
概要
- 論文の詳細を見る
The magnitude of surface roughness effects on electron probe microanalysis (EPMA) has been theoretically calculated through geometrical considerations. The fact that estimated values match experimental data well suggests possible corrections for the data obtained from rough surfaces.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-09-15
著者
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YAMADA Akimasa
National Institute of Advanced Industrial and Science Technology
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FONS Paul
National Institute of Advanced Industrial and Science Technology
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SAKURAI Keiichiro
National Institute of Advanced Industrial and Science Technology
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MATSUBARA Koji
National Institute of Advanced Industrial and Science Technology
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IWATA Kakuya
National Institute of Advanced Industrial and Science Technology
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NIKI Shigeru
National Institute of Advanced Industrial and Science Technology
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Fons Paul
National Institute of Advanced Industrial and Science Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Yamada Akimasa
National Institute of Advanced Industrial and Science Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Niki Shigeru
National Institute of Advanced Industrial and Science Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Iwata Kakuya
National Institute of Advanced Industrial and Science Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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Sakurai Keiichiro
National Institute of Advanced Industrial and Science Technology, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8568, Japan
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