Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth
スポンサーリンク
概要
- 論文の詳細を見る
A spectrally narrowed and wavelength-stabilized KrF excimer laser has been developed. The spectral bandwidth of the laser output was narrowed to 3 pm FWHM using a set of two intracavity air-spaced etalons. An air pressure control system for providing automatic feedback to the intracavity etalons is described. The center wavelength was stabilized to within $\pm 0.5$ pm under feedback control both in a continuous running mode and in an intermittent burst mode.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-11-20
著者
-
Shimada Yasuhiro
Electronics Research Laboratory Matsushita Electronice Corporation
-
Ogata Yoshiro
Electronics Research Laboratory Matsushita Electronice Corporation
-
Wani Koichi
Electronics Research Laboratory Matsushita Electronice Corporation
-
Shimada Yasuhiro
Electronics Research Laboratory, Matsushita Electronics Corporation, Takatsuki, Osaka 569
関連論文
- Time-Dependent Leakage Current Behavior of Integrated Ba_Sr_TiO_3 Thin Film Capacitors during Stressing
- Temperature-Dependent Current-Voltage Characteristics of Fully Processed Ba_Sr_TiO_3 Capacitors Integrated in a Silicon Device
- Si LSI Process Technology for Integrating Ferroelectric Capacitors ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Application of Ferroelectric Thin Films to Si Devices (Special Issue on Quarter Micron Si Device and Process Technologies)
- Thermal Aging Effect in Poled Ferroelectric SrBi_2(Ta,Nb)_2O_9 Capacitors
- Retention Characteristics of a Ferroelectric Memory Based on SrBi_2(Ta, Nb)_2O_9
- Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth : Lithography Technology
- Output Characteristics of a KrF Laser Dependent on the F_2 Absorption in Inactive Regions
- Ferroelectric Nonvolatile Memory Technology and Its Applications
- Voltage Shift Effect on Retention Failure in Ferroelectric Memories
- Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth