High-Bandwidth Si-Based Metal Oxide Semiconductor/Silicon-on-Insulator Photodetectors for Optical Communications

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概要

• 論文の詳細を見る

• Novel Si-on-insulator metal oxide semiconductor (SOI MOS) photodetectors can reach a high bandwidth (22 GHz) and are fully compatible with ultralarge-scale integration (ULSI) technology. Using a the thick buried oxide in the substrate, the diffusion current can be eliminated and the device speed is determined by drift current. The device structure can be optimized by tuning the doping concentration of the buffer layer and the thickness of the epilayers. The analytical model for detector bandwidth are also proposed, and the results fit the simulation well.

• INSTITUTE OF PURE AND APPLIED PHYSICSの論文
• 2005-05-10

著者

• Chang Shu-tong

  Department Of Electrical Engineering National Taiwan University

• Liang Chi-yuan

  Graduate Institute Of Electro-optical Engineering National Taiwan University

• Hsu Buo-chin

  Department Of Electrical Engineering And Graduate Institute Of Electronics Engineering National Taiw

• Liang Chi-Yuan

  Graduate Institute of Electro-Optical Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.

• Hsu Buo-Chin

  Department of Electrical Engineering and Graduate Institute of Electronics Engineering, National Taiwan University, Taipei, Taiwan, R.O.C.

関連論文

• Room-Temperature Electroluminescence from Metal-Oxide-Silicon-Tunneling Diodes on (110) Substrates
• High-Bandwidth Si-Based Metal Oxide Semiconductor/Silicon-on-Insulator Photodetectors for Optical Communications
• Mechanical Bending Cycles of Hydrogenated Amorphous Silicon Layer on Plastic Substrate by Plasma-Enhanced Chemical Vapor Deposition for Use in Flexible Displays
• Impact of Source/Drain Si1-yCy Stressors on Silicon-on-Insulator N-type Metal–Oxide–Semiconductor Field-Effect Transistors
• Electron and Hole Mobilities in Orthorhombically Strained Silicon
• Electron Transport Model for Strained Silicon-Carbon Alloy
• High-Bandwidth Si-Based Metal Oxide Semiconductor/Silicon-on-Insulator Photodetectors for Optical Communications

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