Stiffness of Step Bunches on Si(111)
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概要
- 論文の詳細を見る
Configurations of atomic steps on vicinal Si(111) miscut toward the $[11\bar{2}]$ direction after homoepitaxial step-flow growth were studied as a function of growth thickness by ex situ atomic force microsocopy. We found that step bunches coarsen via the zipping-up of single, double, triple, and quadruple bilayer steps during the growth, and that the zipping steps contact neighboring step bunches at characteristic angles depending on their heights. The new finding of the step-height-dependence enabled us to evaluate step bunch stiffness. The step bunches are shown to be significantly stabilized compared with a simple summation of stiffness of individual single bilayer steps.
- Japan Society of Applied Physicsの論文
- 2004-06-15
著者
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HOMMA Yoshikazu
NTT Basic Research Laboratories
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Omi Hiroo
Ntt Basic Research Laboratories
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Omi Hiroo
NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
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Homma Yoshikazu
NTT Basic Research Laboratories, Atsugi, Kanagawa 243-0198, Japan
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