Highly Texturized Silver Electrode Deposition Using Roll-to-Roll Low-Temperature Sputtering Process

概要

論文の詳細を見る
A large-scale roll-to-roll sputtering apparatus was used for depositing highly texturized Ag electrodes on heat-resistant flexible plastic film substrates for the fabrication of amorphous silicon solar cells. Selective reactive sputtering using Ag-based alloy targets enhances textured morphology formation. Oxygen reacts with Al slightly dispersed into the targets and forms oxide in the deposited electrodes, whereas the Ag matrix is not oxidized and maintains a low resistivity. The textured electrode with an excellent light scattering property enables amorphous silicon single-junction solar cells to increase short circuit current and fill factor, resulting in the improvement of conversion efficiency by approximately 10%.
Japan Society of Applied Physicsの論文
2004-02-15