Excitation Frequency Effects on Stabilized Efficiency of Large-Area Amorphous Silicon Solar Cells Using Flexible Plastic Film Substrate

概要

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The stabilized efficiency of large-area amorphous silicon solar cells depending on plasma excitation frequency was examined by a large-scale roll-to-roll deposition technique called the “stepping-roll” method using flexible plastic film substrates. Increasing the excitation frequency of the inducing rf power for sustaining a plasma decreased peak-to-peak voltage at the cathode, which corresponded to lowering the plasma potential, and improved the stabilized efficiency of the amorphous silicon solar cells. Optimized deposition conditions showing low peak-to-peak voltage were applied to high throughput fabrication processes of large-area amorphous silicon/amorphous silicon germanium tandem cells that showed a stabilized efficiency of over 8%.
2003-11-01